18 December 1998 Microflow devices for miniaturized chemical analysis systems
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Proceedings Volume 3539, Chemical Microsensors and Applications; (1998) https://doi.org/10.1117/12.333754
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States
In the development of chemical analysis systems a clear trend exists towards miniaturization using silicon micromachining. This paper reports on microflow devices such as microvalves, micropumps and bioreactors developed for the application to analytical chemistry. As examples, the design and performance of integrated enzyme-based analysis systems for the determination of gas-phase ethanol will be described.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stephanus Buettgenbach, Stephanus Buettgenbach, Christian Robohm, Christian Robohm, } "Microflow devices for miniaturized chemical analysis systems", Proc. SPIE 3539, Chemical Microsensors and Applications, (18 December 1998); doi: 10.1117/12.333754; https://doi.org/10.1117/12.333754


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