SIA Roadmap: impact on the lithography foodchain (Presentation Only)

Klaus-Dieter Rinnen

doi:10.1117/12.332836

18 December 1998 SIA Roadmap: impact on the lithography foodchain (Presentation Only)

Klaus-Dieter Rinnen

Proceedings Volume 3546, 18th Annual BACUS Symposium on Photomask Technology and Management; (1998) https://doi.org/10.1117/12.332836
Event: 18th Annual BACUS Symposium on Photomask Technology and Management, 1998, Redwood City, CA, United States

Abstract

The evolutionary path of optical lithography is nearing its end . . . or is it? This presentation looks at the ramifications of the 1997 National Technology Road Map on the Photolithography segment, with special focus on the Photomask market. The SIA Roadmap points to a host of challenges that the industry is facing in years to come. These challenges range from an aggressive continuation of device scaling and the associated longer-range question about 'Life after optical Lithography,' to larger wafer sizes with larger sized masks to reduced time to market requirements. While the presentation touches only lightly on the technical aspects of these issues, it will focus in detail on the question: what does it all mean to the business?

Citation Download Citation

Klaus-Dieter Rinnen "SIA Roadmap: impact on the lithography foodchain (Presentation Only)", Proc. SPIE 3546, 18th Annual BACUS Symposium on Photomask Technology and Management, (18 December 1998); https://doi.org/10.1117/12.332836

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available