15 August 1998 Laser synthesis of nano powders of Si-based nitrides and carbides
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Abstract
Amorphous Si3N4, Si/N/C and crystalline SiC nano- powders, 5 - 50 nm in mean diameter, with yields of 250 g/h were synthesized via laser induced gas phase reactions flow cost hexamethyldisilazane (HMDS) and NH3 (or H2). Reaction flame temperatures, which were controlled by the total gas flow rate, greatly influenced powder composition and crystallinity. Amorphous Si3N4 powders (96 wt%) were obtained at 1000 degrees Celsius flow HMDS + NH3; (beta) -SiC (93 wt%) was formed at 1600 degrees Celsius with H2. Amorphous Si/N/C powders with various N/C ratios (0.1 - 6) were synthesized at various temperatures. The main impurities in the powders were the organo-ligands such as NHx and CHx (X equals 1 - 3) whose existence also resulted in a strong surface absorption of oxygen. Commercial production technologies of above mentioned powders were also stated.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yong Liang, Yong Liang, Zhengang Wu, Zhengang Wu, Fen Zheng, Fen Zheng, Quanggang Xian, Quanggang Xian, Zhongchao Feng, Zhongchao Feng, } "Laser synthesis of nano powders of Si-based nitrides and carbides", Proc. SPIE 3550, Laser Processing of Materials and Industrial Applications II, (15 August 1998); doi: 10.1117/12.317900; https://doi.org/10.1117/12.317900
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