Preparation of CuInSe2 thin films by pulsed-laser ablation technique using CuInSe2 bulk crystal targets

Shizutoshi Ando; Saburo Endo; Takeyo Tsukamoto; Yunosuke Makita

doi:10.1117/12.317943

15 August 1998 Preparation of CuInSe₂ thin films by pulsed-laser ablation technique using CuInSe₂ bulk crystal targets

Shizutoshi Ando, Saburo Endo, Takeyo Tsukamoto, Yunosuke Makita

Proceedings Volume 3550, Laser Processing of Materials and Industrial Applications II; (1998) https://doi.org/10.1117/12.317943
Event: Photonics China '98, 1998, Beijing, China

Abstract

CuInSe₂ (CIS) is expected to be applicable to the solar cell materials. We prepared CIS thin films by pulsed laser ablation technique using CIS targets and investigated the influence of the laser energy density, laser repetition frequency and substrate temperature on the fabrication of CIS thin films. The characterization of CIS thin films were carried out by X-ray diffraction (XRD), scanning electron microscope (SEM), electron probe micro-analyzer (EPMA). Further, as-deposited CIS thin films were annealed in Se vapor in order to improve the crystallinity of CIS thin films. We obtained CIS single phase thin films deposited at laser repetition frequency of 10 Hz and deposition time of 120 min. It confirmed that crystallinity in CIS thin films is improved by increasing substrate temperature. In particular, CIS thin film deposited at substrate temperature of 600 degrees Celsius showed a good crystallinity and smooth surface morphology and few droplets. From the results of optical absorption spectra of CIS thin film deposited at 600 degrees Celsius, it showed high absorption coefficient of the order of 10⁴ to approximately 10⁵ cm^-1 in the wide range of wavelength and determined optical band gap Eg equals 1.0 eV. It is found that crystallinity and chemical composition of CIS thin films improved by annealing in Se vapor. CIS thin films was constructed with column-like grains which were grown by annealing.

Citation Download Citation

Shizutoshi Ando, Saburo Endo, Takeyo Tsukamoto, and Yunosuke Makita "Preparation of CuInSe₂ thin films by pulsed-laser ablation technique using CuInSe₂ bulk crystal targets", Proc. SPIE 3550, Laser Processing of Materials and Industrial Applications II, (15 August 1998); https://doi.org/10.1117/12.317943

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