15 August 1998 Synthesis of carbon nitride films by arc-heated atomic nitrogen beams assisted pulsed laser ablation
Author Affiliations +
Abstract
Carbon nitride films were synthesized by active atomic nitrogen beams intersecting pulsed laser plumes at the substrates without heating. The properties of the films were studied by Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and Raman spectroscopy. AES and XPS analysis show that the as- deposited carbon nitride films are mainly composed of [N] and [C], and the composition ratios ([N]/[C]) increase as the pulsed laser repetition rate and energy. XRD results show that several diffraction peaks attributed to (beta) -C3N4 phase were identified. Raman spectra show that several prominent bands related to C-N bondings could be observed.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ning Xu, Yuancheng Du, Zhifeng Ying, Zhongmin Ren, Fuming Li, "Synthesis of carbon nitride films by arc-heated atomic nitrogen beams assisted pulsed laser ablation", Proc. SPIE 3550, Laser Processing of Materials and Industrial Applications II, (15 August 1998); doi: 10.1117/12.317911; https://doi.org/10.1117/12.317911
PROCEEDINGS
10 PAGES


SHARE
Back to Top