12 August 1998 GaAs 1x4 optical power splitter
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Abstract
In this paper, an optical power splitter based on MMI coupler in GaAs/GaAlAs heterostructure materials is fabricated. The epitaxial materials are grown by MBE. The dry etching process is applied to fabricate the ribs in this device. The measuring results are presented.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jianyi Yang, Jianyi Yang, Minghua Wang, Minghua Wang, } "GaAs 1x4 optical power splitter", Proc. SPIE 3551, Integrated Optoelectronics II, (12 August 1998); doi: 10.1117/12.317987; https://doi.org/10.1117/12.317987
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