Nondestructive measurement for impurity concentration inserted in multilayer inhomogeneous material

Jianxin Zhu

doi:10.1117/12.317980

12 August 1998 Nondestructive measurement for impurity concentration inserted in multilayer inhomogeneous material

Jianxin Zhu

Proceedings Volume 3551, Integrated Optoelectronics II; (1998) https://doi.org/10.1117/12.317980
Event: Photonics China '98, 1998, Beijing, China

Abstract

In this paper, for the solid sample composed of three layers in which the thermal property is inhomogeneous and tho optical-absorption coefficient is varied, a new and effective numerical method is proposed, and it is used to nondestructively reconstruct the depth distribution of optical-absorption coefficient in multilayer inhomogeneous material through by the photothermal signal which are measured on the surface of a sample with the photothermal method. By means of the relation between absorption coefficient and nitrogen concentration, we may obtain the spatial distribution of the nitrogen concentration in a GaP:N sample. Inverse results by experimental data show that the performance of the approach at p/n junction is better.

Citation Download Citation

Jianxin Zhu "Nondestructive measurement for impurity concentration inserted in multilayer inhomogeneous material", Proc. SPIE 3551, Integrated Optoelectronics II, (12 August 1998); https://doi.org/10.1117/12.317980

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