11 August 1998 Design and fabrication of 128x128 diffractive microlens arrays on Si for PtSi focal plane arrays
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Abstract
Diffractive microlens arrays have been designed to improve the performance of PtSi Schottky barrier IR image sensors. They have been fabricated on the surface of Si substrates by successive photolithography and Ar+ ion-beam-etching technique, which operate at (lambda) equals 4.0 micrometers with a lens diameter of 100 micrometers and the lens F number of 1.56. The practical processes and fabrication method are shown and discussed. The microanalysis and optical characteristics of the diffractive microlens arrays are also presented. The experimental and theoretical results are in good agreement.
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Yi Li, Yi Li, Xinjian Yi, Xinjian Yi, Jianhua Hao, Jianhua Hao, } "Design and fabrication of 128x128 diffractive microlens arrays on Si for PtSi focal plane arrays", Proc. SPIE 3553, Detectors, Focal Plane Arrays, and Imaging Devices II, (11 August 1998); doi: 10.1117/12.318063; https://doi.org/10.1117/12.318063
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