11 August 1998 System for measurement of CCD parameters
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This paper presents a system for measurement of CCD parameters that combines a photo-injection system and auto- focus systems. In the photo-injection system, a reverse microscope with plano-achromatic objective is used to produce a small light spot of (Phi) 2 micrometers . In the auto- focus system, astigmatic auto-focus method is applied. The auto-focus signal is detected by a simulation quadrate simulated by CCD. A piezoelectric transducer with high sensitivity and resolution is used to drive the focusing objective for a real-time control of the position of the small light spot which was required to be injected into one of pixels of CCD measured.
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Rihong Zhu, Rihong Zhu, Daocai Xiang, Daocai Xiang, Zhixing Yang, Zhixing Yang, Jinbang Chen, Jinbang Chen, } "System for measurement of CCD parameters", Proc. SPIE 3553, Detectors, Focal Plane Arrays, and Imaging Devices II, (11 August 1998); doi: 10.1117/12.318089; https://doi.org/10.1117/12.318089

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