13 August 1998 Measurement for both vibration and deformation of microsurface by Fizeau interferometer of composite self-focus rod sensor
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Abstract
By using composite self-focus rod, LD-pumped frequency doubling Nd:YVO4 laser and 3D fine regulation stand, a new Fizeau-type interferometer is developed. It can apply to measuring the micro-vibration and deformation of micro- surface at the same time. The theoretical analysis and the experimental results for the interferometer of self-focus sensor are given.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hai Ming, Hai Ming, Xiaohong Sun, Xiaohong Sun, Ming Bai, Ming Bai, Zhongcheng Liang, Zhongcheng Liang, Guoping Zhang, Guoping Zhang, Hui Li, Hui Li, Yunxia Wu, Yunxia Wu, Jiangping Xie, Jiangping Xie, Jizu Shu, Jizu Shu, } "Measurement for both vibration and deformation of microsurface by Fizeau interferometer of composite self-focus rod sensor", Proc. SPIE 3555, Optical and Fiber Optic Sensor Systems, (13 August 1998); doi: 10.1117/12.318154; https://doi.org/10.1117/12.318154
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