5 August 1998 Analysis of errors and calibration method for manufacturing multilevel diffractive optical element by ion etching
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Abstract
Fabrication errors and its affecting factors were analyzed for multilevel DOE in this paper. A method of Moire fringe alignment was put forth. It was proved by actual manufacturing that this way is available for aligning positioning error.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yongqi Fu, Yongqi Fu, Zhenwu Lu, Zhenwu Lu, Yueying Ma, Yueying Ma, Zhicheng Weng, Zhicheng Weng, } "Analysis of errors and calibration method for manufacturing multilevel diffractive optical element by ion etching", Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); doi: 10.1117/12.318298; https://doi.org/10.1117/12.318298
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