5 August 1998 Binary optical element for dividing harmonic waves applied in ICF system
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This paper aims at the request of dividing harmonic waves in the high power laser system used to perform Inertial Confinement Fusion. Dividing harmonic waves is realized by introducing binary optical element. Based on scalar diffraction theory, the distribution of its diffraction field was calculated and the fabrication parameters were also optimized. The element is fabricated with RIE. We also measured the relief structure and diffraction efficiency of each harmonic wave and analyze the errors.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yongkang Guo, Yongkang Guo, Jingqin Su, Jingqin Su, Jinglei Du, Jinglei Du, Qizhong Huang, Qizhong Huang, Jun Yao, Jun Yao, Yixiao Zhang, Yixiao Zhang, XiaoFeng Wei, XiaoFeng Wei, Xiaodong Yuan, Xiaodong Yuan, Jing Yuan, Jing Yuan, "Binary optical element for dividing harmonic waves applied in ICF system", Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); doi: 10.1117/12.318296; https://doi.org/10.1117/12.318296

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