5 August 1998 Multilayered step index microlens of low spherical aberration
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A step index planar microlens fabrication process is described for obtaining low spherical aberration. This microlens can be used to achieve effective light coupling between different optical elements and microcircuits in integrated optics. Polymethyl methacrylate (PMMA) doped with N, N'-dihexyl-amino-nitrostelbene (DHANS) is used as lens materials. A concave surface of 580 micrometers diameter is made on Germenia-Silica glass substrate of refractive index 1.4537 at (lambda) equals 1.3 micrometers . Films of different refractive indices are deposited one upon another on the concave surface to obtain multi-layered step index microlens. Refractive index variation of different layers is controlled by percentage of DHANS doping in PMMA. Spherical aberration of the lens is minimized by using step index multi-layered structure of the lens. Theoretical model for longitudinal and lateral spherical aberration is developed using ray theory. The lateral and longitudinal spherical aberration is minimized to a lower value of 1.55 micron and 48.87 micron respectively with the numerical aperture of the lens NA equals 0.0209 and focal length f equals 13.78 mm.
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Alok Kumar Das, Alok Kumar Das, Amar K. Ganguly, Amar K. Ganguly, Ardhendu Saha, Ardhendu Saha, } "Multilayered step index microlens of low spherical aberration", Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); doi: 10.1117/12.318334; https://doi.org/10.1117/12.318334

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