Paper
5 August 1998 Progress of advanced optical manufacture technology in Chengdu Fine Optical Engineering Research Center
Li Yang, Wei Li
Author Affiliations +
Abstract
A newly established optical research institution of Chengdu Fine Optical Engineering Research Center in China as introduced. Some progress of advanced optical manufacture technology in CFOERC are reported. Plasma ion assisted deposition technique performed on the equipment APS-1504 is described. Absolute testing of three flat on WYKO 24' large aperture phase shifting interferometer is investigated. Other phases about optical manufacture in the center are given simply.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Li Yang and Wei Li "Progress of advanced optical manufacture technology in Chengdu Fine Optical Engineering Research Center", Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); https://doi.org/10.1117/12.318303
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Optics manufacturing

Plasma

Optical engineering

Interferometers

Ions

Coating

Optical testing

RELATED CONTENT

Effectible factors in optics profile testing
Proceedings of SPIE (June 13 2005)
Pilot study for ion beam figuring process
Proceedings of SPIE (October 06 2010)

Back to Top