Testing method on nanometer-grade true microprofile of optical surface

Jianbai Li; Xiaoyun Li; Aihan Ying; Shaorong Xiao; Ming Wang; Anging Zhuo

doi:10.1117/12.318318

5 August 1998 Testing method on nanometer-grade true microprofile of optical surface

Jianbai Li, Xiaoyun Li, Aihan Ying, Shaorong Xiao, Ming Wang, Anging Zhuo

Author Affiliations +

Proceedings Volume 3557, Current Developments in Optical Elements and Manufacturing; (1998) https://doi.org/10.1117/12.318318
Event: Photonics China '98, 1998, Beijing, China

Abstract

In this paper, the new method on testing and evaluating of optical surface microprofile using Atomic Force Microscope (AFM), which has both good vertical and lateral resolution. The nanometer-grade microprofile of super-smooth optical surface can be obtained using AFM method, but can't by classical interferometer, as the latter has a poor lateral resolution. Some tested examples of optical surface are shown in the paper. The microprofile images are viewed in monitor and printed in microcomputer.

Citation Download Citation

Jianbai Li, Xiaoyun Li, Aihan Ying, Shaorong Xiao, Ming Wang, and Anging Zhuo "Testing method on nanometer-grade true microprofile of optical surface", Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); https://doi.org/10.1117/12.318318

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