5 August 1998 Testing method on nanometer-grade true microprofile of optical surface
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Abstract
In this paper, the new method on testing and evaluating of optical surface microprofile using Atomic Force Microscope (AFM), which has both good vertical and lateral resolution. The nanometer-grade microprofile of super-smooth optical surface can be obtained using AFM method, but can't by classical interferometer, as the latter has a poor lateral resolution. Some tested examples of optical surface are shown in the paper. The microprofile images are viewed in monitor and printed in microcomputer.
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Jianbai Li, Xiaoyun Li, Aihan Ying, Shaorong Xiao, Ming Wang, Anging Zhuo, "Testing method on nanometer-grade true microprofile of optical surface", Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); doi: 10.1117/12.318318; https://doi.org/10.1117/12.318318
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