10 August 1998 Modeling and simulation of optimization design for structure parameters of CCD intersection measurement system
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Abstract
In order to obtain high measuring accuracy, a method of optimization-design is established. Then the computer simulation for the model is introduced. Finally, as results, the optimum structure parameters corresponding to two kinds of target-planes with different size are tabled. In addition, a group of 3D figures of the error distribution are given.
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Haibao Lu, Haibao Lu, Huayong Yang, Huayong Yang, Wusheng Luo, Wusheng Luo, Shuhua Yan, Shuhua Yan, Qinqun Feng, Qinqun Feng, } "Modeling and simulation of optimization design for structure parameters of CCD intersection measurement system", Proc. SPIE 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II, (10 August 1998); doi: 10.1117/12.318390; https://doi.org/10.1117/12.318390
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