Parallel confocal detection method for three-dimensional surface topography with a micro-optic component

Weijian Tian; Zhengkang Bao; Zhihua Ding; Chenghua Sui; Zhijun Xu

doi:10.1117/12.318382

10 August 1998 Parallel confocal detection method for three-dimensional surface topography with a micro-optic component

Weijian Tian, Zhengkang Bao, Zhihua Ding, Chenghua Sui, Zhijun Xu

Proceedings Volume 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II; (1998) https://doi.org/10.1117/12.318382
Event: Photonics China '98, 1998, Beijing, China

Abstract

The parallel confocal method for detecting whole-field 3-D surface topography is proposed in this paper. For the realization of the method, in the confocal optical system, the micro-optic array component composed of a microlens array and a matched pinhole array has been introduced to produce a symmetrical micro-array source. Thus, it can be performed to paralleling measure the tested object surface at the same time with the multi-detecting light beams. The method fully and successfully shows the advantage of optical parallel processing in the confocal system, and overcomes the problem of a long-period scanning required by the original confocal system, from which deviations occur. Meanwhile, some experimental results with the parallel confocal detecting method are presented in the paper.

Citation Download Citation

Weijian Tian, Zhengkang Bao, Zhihua Ding, Chenghua Sui, and Zhijun Xu "Parallel confocal detection method for three-dimensional surface topography with a micro-optic component", Proc. SPIE 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II, (10 August 1998); https://doi.org/10.1117/12.318382

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