10 August 1998 Parallel confocal detection method for three-dimensional surface topography with a micro-optic component
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Abstract
The parallel confocal method for detecting whole-field 3-D surface topography is proposed in this paper. For the realization of the method, in the confocal optical system, the micro-optic array component composed of a microlens array and a matched pinhole array has been introduced to produce a symmetrical micro-array source. Thus, it can be performed to paralleling measure the tested object surface at the same time with the multi-detecting light beams. The method fully and successfully shows the advantage of optical parallel processing in the confocal system, and overcomes the problem of a long-period scanning required by the original confocal system, from which deviations occur. Meanwhile, some experimental results with the parallel confocal detecting method are presented in the paper.
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Weijian Tian, Weijian Tian, Zhengkang Bao, Zhengkang Bao, Zhihua Ding, Zhihua Ding, Chenghua Sui, Chenghua Sui, Zhijun Xu, Zhijun Xu, } "Parallel confocal detection method for three-dimensional surface topography with a micro-optic component", Proc. SPIE 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II, (10 August 1998); doi: 10.1117/12.318382; https://doi.org/10.1117/12.318382
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