Topography measurement by changing distance

Yingjie Yu; Pengsheng Li; Xifu Qiang

doi:10.1117/12.318432

10 August 1998 Topography measurement by changing distance

Yingjie Yu, Pengsheng Li, Xifu Qiang

Proceedings Volume 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II; (1998) https://doi.org/10.1117/12.318432
Event: Photonics China '98, 1998, Beijing, China

Abstract

The paper describes the method to get a small sampling step by changing the distance between light point in the heterodyne interferometer. And it gives the method to measure topography. Finally, it analyzes the measurement error.

Citation Download Citation

Yingjie Yu, Pengsheng Li, and Xifu Qiang "Topography measurement by changing distance", Proc. SPIE 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II, (10 August 1998); https://doi.org/10.1117/12.318432

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