Compositional analysis of multisubstituted magnetic film with EPMA

Baihong Shu; Xingwu Long

doi:10.1117/12.319696

18 August 1998 Compositional analysis of multisubstituted magnetic film with EPMA

Baihong Shu, Xingwu Long

Proceedings Volume 3560, Display Devices and Systems II; (1998) https://doi.org/10.1117/12.319696
Event: Photonics China '98, 1998, Beijing, China

Abstract

The compositional quantification analysis for series samples with molecular formula of (PrGdYbBi)₃(FeAl)₅O₁₂ (multi-substituted epitaxial yttrium iron garnet film on gadolinium gallium garnet substrate) is processed with EPMA. The self-made oxide standard samples are tested and used. During measurement, the influence of the substrate, interference between X-rays emitted from different element and poor uniformity of samples are took into account. The ZAF correction is also processed. The whole error is less than 3.5wt%, and the precision for single element is better than 2wt% comparing with samples with exactly known composition.

Citation Download Citation

Baihong Shu and Xingwu Long "Compositional analysis of multisubstituted magnetic film with EPMA", Proc. SPIE 3560, Display Devices and Systems II, (18 August 1998); https://doi.org/10.1117/12.319696

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