18 August 1998 Compositional analysis of multisubstituted magnetic film with EPMA
Author Affiliations +
Abstract
The compositional quantification analysis for series samples with molecular formula of (PrGdYbBi)3(FeAl)5O12 (multi-substituted epitaxial yttrium iron garnet film on gadolinium gallium garnet substrate) is processed with EPMA. The self-made oxide standard samples are tested and used. During measurement, the influence of the substrate, interference between X-rays emitted from different element and poor uniformity of samples are took into account. The ZAF correction is also processed. The whole error is less than 3.5wt%, and the precision for single element is better than 2wt% comparing with samples with exactly known composition.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Baihong Shu, Xingwu Long, "Compositional analysis of multisubstituted magnetic film with EPMA", Proc. SPIE 3560, Display Devices and Systems II, (18 August 1998); doi: 10.1117/12.319696; https://doi.org/10.1117/12.319696
PROCEEDINGS
7 PAGES


SHARE
Back to Top