Atomic force microscope study of excimer-laser-treated graphite surfaces

Adam Mechler; Peter Heszler; Zoltan Kantor; Tamas Szoerenyi; Zsolt Bor

doi:10.1117/12.320984

19 August 1998 Atomic force microscope study of excimer-laser-treated graphite surfaces

Adam Mechler, Peter Heszler, Zoltan Kantor, Tamas Szoerenyi, Zsolt Bor

Proceedings Volume 3573, OPTIKA '98: 5th Congress on Modern Optics; (1998) https://doi.org/10.1117/12.320984
Event: OPTIKA '98: Fifth Congress on Modern Optics, 1998, Budapest, Hungary

Abstract

Treating of highly oriented pyrolytic graphite surface by ArF excimer ((lambda) equals 193 nm) laser pulses above the ablation threshold, in the range of 0.4 and 4 J/cm² laser fluences was investigated. Atomic force microscopy and area-selective Raman spectroscopy was used for the observation of the surface morphology and determination of the quality of the remaining material. At low (< 0.6 J/cm²) fluence a material removal rate of several monolayer per laser pulse was detected, without changing the quality of the remaining material. Irradiation at high (approximately 2 J/cm²) fluence resulted in ablation rates of the order of 10 nm/pulse and the formation of an approx. 300 nm thick diamond-like carbon film with approx. 50% concentration of the sp³ hybrid-states of carbon. The graphite structure of the laser-modified layer was perfectly recovered upon annealing the irradiated surfaces in air at 650 degree(s)C for 30 minutes.

Citation Download Citation

Adam Mechler, Peter Heszler, Zoltan Kantor, Tamas Szoerenyi, and Zsolt Bor "Atomic force microscope study of excimer-laser-treated graphite surfaces", Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); https://doi.org/10.1117/12.320984

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