Paper
19 August 1998 Concept of a neural system for real-time evaluation of spectroscopic measurements
L. Redei, Miklos Fried, Tivadar Lohner, O. Polgar, Istvan Barsony, Sz. Forizs, Zoltan G. Horvath, Josef Humlicek, H. Wallinga
Author Affiliations +
Proceedings Volume 3573, OPTIKA '98: 5th Congress on Modern Optics; (1998) https://doi.org/10.1117/12.320999
Event: OPTIKA '98: Fifth Congress on Modern Optics, 1998, Budapest, Hungary
Abstract
A hardware implementation of a Backpropagation feedforward neural network has been designed. The tool was proposed for reflectometric measurements integrated together with photosensor arrays. The intelligent reflectometric sensor is being implemented in a multi-chip-module approach. A logarithmic input transformation is applied for easing the misalignment and parameter scatter correction. It also allows for easy ratio calculation by subtraction for normalization with the reference value. The neural network was designed for complexities up to 100 inputs, 30 hidden neurons and 5 outputs. The digital building blocks (neurons) utilize a logic approximation of the sigmoid nonlinearity and the possibility of weight scaling. These hardware solutions result in a simultaneous area reduction and speed gain, at the cost of slightly decreased performance. Simulations of the proposed neural system prove applicability for evaluation of optical measurements were performed for reflectometric and ellipsometric data thin porous layers. Hardware simulations showed good correspondence to the optimum-case neural software simulations.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
L. Redei, Miklos Fried, Tivadar Lohner, O. Polgar, Istvan Barsony, Sz. Forizs, Zoltan G. Horvath, Josef Humlicek, and H. Wallinga "Concept of a neural system for real-time evaluation of spectroscopic measurements", Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); https://doi.org/10.1117/12.320999
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KEYWORDS
Neurons

Computer simulations

Neural networks

Silicon

Logic

Spectroscopy

Error analysis

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