19 August 1998 Laser-assisted chemical vapor deposition of diamond microstructures
Author Affiliations +
Proceedings Volume 3573, OPTIKA '98: 5th Congress on Modern Optics; (1998) https://doi.org/10.1117/12.320995
Event: OPTIKA '98: Fifth Congress on Modern Optics, 1998, Budapest, Hungary
Abstract
High quality diamond has been deposited area selectivity onto thin tungsten films layered onto fused silica substrates in a hot filament CVD reactor. The deposition method uses a hot filament process which is combined with localized heating by a focused Nd-YAG laser beam.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zsolt Toth, Zsolt Toth, Adam Mechler, Adam Mechler, Peter Heszler, Peter Heszler, "Laser-assisted chemical vapor deposition of diamond microstructures", Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); doi: 10.1117/12.320995; https://doi.org/10.1117/12.320995
PROCEEDINGS
4 PAGES


SHARE
RELATED CONTENT


Back to Top