19 August 1998 Optical correlation technique for measurement of roughness at microfacets of reflection-type diffraction gratings
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Proceedings Volume 3573, OPTIKA '98: 5th Congress on Modern Optics; (1998); doi: 10.1117/12.321020
Event: OPTIKA '98: Fifth Congress on Modern Optics, 1998, Budapest, Hungary
Abstract
Physical principles and techniques the noncontact interference method for rough microfacets surface diagnostics are discussed. Measuring of roughness at different facets we obtained the values of Rq within the range from 0.005 to 0.05 micrometers.
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Oleg V. Angelsky, Peter P. Maksimyak, "Optical correlation technique for measurement of roughness at microfacets of reflection-type diffraction gratings", Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); doi: 10.1117/12.321020; https://doi.org/10.1117/12.321020
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KEYWORDS
Diffraction gratings

Mirrors

Photodetectors

Diagnostics

Objectives

Modulators

Phase measurement

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