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19 August 1998 Phase-shifting interferometric data processing based on recurrence filtering methodology
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Proceedings Volume 3573, OPTIKA '98: 5th Congress on Modern Optics; (1998) https://doi.org/10.1117/12.320951
Event: OPTIKA '98: Fifth Congress on Modern Optics, 1998, Budapest, Hungary
Abstract
Interferometric data in 2D phase-shifting interferometry (PSI) can be expressed as K samples of M-dimensional signal (MDS), where K-1 is the number of phase steps, M equals N X L is the single interference pattern points number. Whole quantity of PSI data can arrive at several Mbytes. It is not convenient for data processing in real time. We propose new Recurrence Phase-Shifting Interferometry (RPSI) technique. RPSI gives the optimal assessment of MDS phase on each point by the recurrence procedure of signal processing. It is predicted the signal value from previous step to next step. The prediction error is used for signal parameters correction with taking into account the particularities of signal model. It was discovered that true phase estimation in conventional one-wavelength interferometer is arrived by 8 - 11 phase steps that is in good agreement with known PSI methods. The advantages of RPSI technique are: noise- immunity, quickness of signal processing and moderate requirements to phase step accuracy.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Igor P. Gurov and Adalet N. Djabiev "Phase-shifting interferometric data processing based on recurrence filtering methodology", Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); https://doi.org/10.1117/12.320951
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