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19 August 1998Scanning optical interferometry microscopy, using optical fiber probe
The aim of this report is to introduce a new method of scanning optical fiber microscopy, in which a single-mode optical fiber probe for studying the optical and topographical properties of a sample is used. It operates based on an interferometry technique that is named Fiber Probe Interferometric Microscopy (FPIM). The intensity of the light coupled into the fiber probe is modulated by the properties of the sample such as the local reflectivity, tilting and the distance between the radiating end of the fiber and the sample. The geometry of the envelopes of the interference intensity fringes caused by axially translating sample, at any location, is considered as a powerful measuring tool. FPIM system and technique for measuring the mentioned quantities are explained.
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E. G. Hassan Fatemi, "Scanning optical interferometry microscopy, using optical fiber probe," Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); https://doi.org/10.1117/12.321023