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7 April 1999 Characterization of surface and subsurface defects in optical materials using near-field evanescent wave (Abstract Only)
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Abstract
Optical properties of sub-micron defects is of interest in many application, including laser induced damage in optical materials. In-situ scanning atomic force microscopy has been used previously to establish a direct correlation between a particular structure surface inhomogeneity and the initiation of local laser damage at that inhomogeneity, as in the case of nodular defects in coatings. Recent development in near field scanning optical microscopy shows that this technique can also provide information on both morphology and optical properties of localized defects.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ming Yan, Stan Oberhelman, Wigbert J. Siekhaus, Zhouling Wu, Lynn Matthew Sheehan, and Mark R. Kozlowski "Characterization of surface and subsurface defects in optical materials using near-field evanescent wave (Abstract Only)", Proc. SPIE 3578, Laser-Induced Damage in Optical Materials: 1998, (7 April 1999); https://doi.org/10.1117/12.344425
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