7 April 1999 Coated optics for DUV excimer laser applications (Abstract Only)
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Abstract
Recent developments of DUV-excimer laser applications have gained in demands for radiation resistant coated components at interesting wavelengths. To meet the requirements of long term reliability and high pulse number throughput a superior performance of the optical components with lowest absorption and scattering losses is necessary. Within the framework of the German Joint Research Project "OPUS II" efforts are made to investigate the optical properties, the radiation resistance, and long term stability of single layers and layer systems of interest in the DUV. The evaluation of optical coatings and coating systems (AR and H R) on different substrate materials was carried out by scattering experiments, atomic force microscopy, infrared spectroscopy, calorimetric absorption measurements, determination of laser induced damage threshold (1-on-i, 1 000-on-i) and scratch tests. Additionally from spectrophotometric measurements the optical behaviour of the films was examined.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jens Ullmann, Jens Ullmann, Michael Mertin, Michael Mertin, Hans Lauth, Hans Lauth, Helmut Bernitzki, Helmut Bernitzki, Klaus R. Mann, Klaus R. Mann, Detlev Ristau, Detlev Ristau, Winfried Arens, Winfried Arens, Roland Thielsch, Roland Thielsch, Norbert Kaiser, Norbert Kaiser, } "Coated optics for DUV excimer laser applications (Abstract Only)", Proc. SPIE 3578, Laser-Induced Damage in Optical Materials: 1998, (7 April 1999); doi: 10.1117/12.344440; https://doi.org/10.1117/12.344440
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