7 April 1999 Measurement and analysis of compaction in fused silica
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Laser irradiation of fused silica produces compaction. Irradiation at photolithographic wavelengths of 248nm or 193nm produces density increase of order parts per millon. While these changes are small, the accompanying increase in index of refraction may be large enough to degrade the performance of photolithographic exposure optics. This paper reports experimental of compaction by interferometry and theoretical analysis of the elastic response of the glass samples to extract the sample-independent unconstrained compaction. The power law behavior of compaction vs. exposure dose is presented, along with a Monte Carlo analysis of error bars on this curve.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Douglas C. Allan, Douglas C. Allan, Charlene M. Smith, Charlene M. Smith, Nicholas F. Borrelli, Nicholas F. Borrelli, } "Measurement and analysis of compaction in fused silica", Proc. SPIE 3578, Laser-Induced Damage in Optical Materials: 1998, (7 April 1999); doi: 10.1117/12.344433; https://doi.org/10.1117/12.344433

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