Submicrofabrication of periodical structures on a metallic film surface by intracavity laser processing

Vasily V. Valyavko; Vladimir P. Osipov

doi:10.1117/12.330455

6 November 1998 Submicrofabrication of periodical structures on a metallic film surface by intracavity laser processing

Vasily V. Valyavko, Vladimir P. Osipov

Proceedings Volume 3580, Photoconversion: Science and Technologies; (1998) https://doi.org/10.1117/12.330455
Event: Photoconversion: Science and Technologies, 1997, Warsaw, Poland

Abstract

In this work it is reported about the further development of the intracavity method of the solid state surface processing by the laser radiation. It is experimentally shown the possibility to form 2D periodical micron and submicron surface structures, looking as a system of squares, rectangles and parallelograms. A new type of the laser cavity allowed to fabricate a system of regular microhollows with submicron characteristic sizes even by means of the carbon dioxide laser treatment (10.6-micron radiation wavelength).

Citation Download Citation

Vasily V. Valyavko and Vladimir P. Osipov "Submicrofabrication of periodical structures on a metallic film surface by intracavity laser processing", Proc. SPIE 3580, Photoconversion: Science and Technologies, (6 November 1998); https://doi.org/10.1117/12.330455

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