11 November 1998 Determination of the elastic properties of carbon thin films using scanning acoustic microscopy
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Proceedings Volume 3581, Acousto-Optics and Applications III; (1998); doi: 10.1117/12.330498
Event: Acousto-Optics and Applications III, 1998, Gdansk-Jurata, Poland
Abstract
Scanning acoustic microscopy is used to determine elastic properties of carbon thin films. The films have been deposited by fullerene-argon-ionbeam deposition on crownglass substrates. With V(z) measurements, their elastic constants and experimental dispersion relations can be obtained. These are compared with numerically calculated dispersion relations. Using a simplex method for least- square data fitting the Young's modulus, the shear modulus and Poisson's ratio of the measured carbon thin films were determined.
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A. Pageler, Klaus Kosbi, Ulf G. Brauneck, Hans Gerd G. Busmann, Siegfried Boseck, "Determination of the elastic properties of carbon thin films using scanning acoustic microscopy", Proc. SPIE 3581, Acousto-Optics and Applications III, (11 November 1998); doi: 10.1117/12.330498; https://doi.org/10.1117/12.330498
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KEYWORDS
Carbon

Thin films

Acoustics

Microscopy

Dispersion

Vitreous

Wave propagation

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