21 April 1999 Hollow fiber delivery of ArF and KrF excimer laser light
Author Affiliations +
Proceedings Volume 3596, Specialty Fiber Optics for Medical Applications; (1999) https://doi.org/10.1117/12.346704
Event: BiOS '99 International Biomedical Optics Symposium, 1999, San Jose, CA, United States
For delivery of ArF and KrF excimer laser light, a hollow fiber composed of a glass capillary tube and an aluminum thin film on the inside was proposed. A thin aluminum film is deposited by metal-organic chemical vapor deposition employing dimethylethylamine alane as the source material. Measured loss spectra in vacuum-UV and UV regions and measured losses for ArF-excimer laser light show the low loss property of the aluminum-coated fiber at both of the ArF and KrF excimer laser light. The straight loss of 1-m long, 1-mm bore fiber was 1.0 dB for ArF and 0.4 dB for KrF excimer lasers.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yuji Matsuura, Mitsunobu Miyagi, "Hollow fiber delivery of ArF and KrF excimer laser light", Proc. SPIE 3596, Specialty Fiber Optics for Medical Applications, (21 April 1999); doi: 10.1117/12.346704; https://doi.org/10.1117/12.346704


A new technique for the measurement of thin film growth
Proceedings of SPIE (September 01 1999)
Hollow fibers for Nd:YAG and excimer lasers
Proceedings of SPIE (April 14 2000)
Hollow fiber delivery of F2-excimer laser light
Proceedings of SPIE (June 04 2001)
Wetability of sol-gel-derived TiO2 films
Proceedings of SPIE (November 29 2000)
Hollow fibers for delivery of high-power lasers
Proceedings of SPIE (August 16 2000)

Back to Top