21 April 1999 Hollow fiber delivery of ArF and KrF excimer laser light
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Proceedings Volume 3596, Specialty Fiber Optics for Medical Applications; (1999) https://doi.org/10.1117/12.346704
Event: BiOS '99 International Biomedical Optics Symposium, 1999, San Jose, CA, United States
Abstract
For delivery of ArF and KrF excimer laser light, a hollow fiber composed of a glass capillary tube and an aluminum thin film on the inside was proposed. A thin aluminum film is deposited by metal-organic chemical vapor deposition employing dimethylethylamine alane as the source material. Measured loss spectra in vacuum-UV and UV regions and measured losses for ArF-excimer laser light show the low loss property of the aluminum-coated fiber at both of the ArF and KrF excimer laser light. The straight loss of 1-m long, 1-mm bore fiber was 1.0 dB for ArF and 0.4 dB for KrF excimer lasers.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yuji Matsuura, Yuji Matsuura, Mitsunobu Miyagi, Mitsunobu Miyagi, } "Hollow fiber delivery of ArF and KrF excimer laser light", Proc. SPIE 3596, Specialty Fiber Optics for Medical Applications, (21 April 1999); doi: 10.1117/12.346704; https://doi.org/10.1117/12.346704
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