6 May 1999 High-resolution real-time full-field interference microscopy
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Proceedings Volume 3605, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing VI; (1999) https://doi.org/10.1117/12.347563
Event: BiOS '99 International Biomedical Optics Symposium, 1999, San Jose, CA, United States
Abstract
We have built an interference microscope that produces in real-time images of cross-section slices located at adjustable depths inside 3-D objects. The microscope is based on a Michelson-type polarization interferometer. A light emitting diode (LED), used as an optical source at (lambda) equals 840 nm with short coherence length, provides optical sectioning ability with better than 10 micrometer resolution in the depth dimension. By using high numerical aperture objective lenses (NA equals 0.95), the depth resolution can be improved to better than 1 micrometer, in good agreement with theory. Images can be produced at the rate of 50 per second using a multiplexed lock-in detection and MMX assembler-optimized calculation routines. Cross-section images inside an onion and at different depths in a multilayer silicon integrated circuit are presented.
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Arnaud Dubois, Arnaud Dubois, Martial Lebec, Martial Lebec, Emmanuel Beaurepaire, Emmanuel Beaurepaire, Sandrine Leveque, Sandrine Leveque, Albert Claude Boccara, Albert Claude Boccara, } "High-resolution real-time full-field interference microscopy", Proc. SPIE 3605, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing VI, (6 May 1999); doi: 10.1117/12.347563; https://doi.org/10.1117/12.347563
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