3 June 1999 Large microchannel array fabrication and results for DNA sequencing
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Proceedings Volume 3606, Micro- and Nanofabricated Structures and Devices for Biomedical Environmental Applications II; (1999) https://doi.org/10.1117/12.350050
Event: BiOS '99 International Biomedical Optics Symposium, 1999, San Jose, CA, United States
Abstract
We have developed a process for the production of microchannel arrays on bonded glass substrates up to 14 X 58 cm, for DNA sequencing. Arrays of 96 and 384 microchannels, each 46 cm long have been built. This technology offers significant advantages over discrete capillaries or conventional slab-gel approaches. High throughput DNA sequencing with over 550 base pairs resolution has been achieved. With custom fabrication apparatus, microchannels are etched in a borosilicate substrate, and then fusion bonded to a top substrate 1.1 mm thick that has access holes formed in it. SEM examination shows a typical microchannel to be 40 X 180 micrometers by 46 cm long; the etch is approximately isotropic, leaving a key undercut, for forming a rounded channel. The surface roughness at the bottom of the 40 micrometer deep channel has been profilometer measured to be as low as 20 nm; the roughness at the top surface was 2 nm. Etch uniformity of about 5% has been obtained using a 22% vol. HF/78% Acetic acid solution. The simple lithography, etching, and bonding of these substrate enables efficient production of these arrays and extremely precise replication from master masks and precision machining with a mandrel.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Steve P. Swierkowski, Steve P. Swierkowski, Joseph W. Balch, Joseph W. Balch, Laurence R. Brewer, Laurence R. Brewer, Alex C. Copeland, Alex C. Copeland, J. Courtney Davidson, J. Courtney Davidson, J. Patrick Fitch, J. Patrick Fitch, Joseph R. Kimbrough, Joseph R. Kimbrough, Ramakrishna S. Madabhushi, Ramakrishna S. Madabhushi, Ron L. Pastrone, Ron L. Pastrone, Paul M. Richardson, Paul M. Richardson, Lisa A. Tarte, Lisa A. Tarte, Marina Vainer, Marina Vainer, } "Large microchannel array fabrication and results for DNA sequencing", Proc. SPIE 3606, Micro- and Nanofabricated Structures and Devices for Biomedical Environmental Applications II, (3 June 1999); doi: 10.1117/12.350050; https://doi.org/10.1117/12.350050
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