Concurrent in-line inspection system for CO2 laser drilling machine

Makoto Kato; Nobuhiro Araki; Kazuhide Isaji; Hidehiko Karasaki

doi:10.1117/12.352715

15 July 1999 Concurrent in-line inspection system for CO₂ laser drilling machine

Makoto Kato, Nobuhiro Araki, Kazuhide Isaji, Hidehiko Karasaki

Proceedings Volume 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV; (1999) https://doi.org/10.1117/12.352715
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

We describe the concurrent in-line inspection system, which controls the CO₂ laser drilling machine for printed wiring boards. The performance of a CO₂ laser drilling process was improved drastically by the introduction of this inspection system. The principle of this inspection systems is based on the relationship between the exposed bottom area of the inner layer copper foil in via hole and the intensity of the reflected laser beam. The end of drilling process is detectable by the saturation of the reflected laser beam intensity generate at the copper foil surface of the blind via hole. We have carried out the drilling process for glass-cored epoxy substrate and have observed that the productivity of the drilling process i increased by 30 percent due to this inspection system.

Citation Download Citation

Makoto Kato, Nobuhiro Araki, Kazuhide Isaji, and Hidehiko Karasaki "Concurrent in-line inspection system for CO₂ laser drilling machine", Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); https://doi.org/10.1117/12.352715

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