15 July 1999 Correlation between power density fluctuation and grain size distribution of laser-annealed polycrystalline silicon
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Abstract
The grain size of polycrystalline silicon by the excimer laser annealing (ELA) is primarily determined by the fluence, and the distribution uniformity is strongly influenced by the intensity fluctuation. Instead of the conventional CCD profile, a resist film is used to monitor the light intensity distributions over whole illumination area in submicron resolution. The high resolution measurements show speckle patterns with 0.1-0.15 spacing with maximum 10mJ/cm2 variation. The fluctuation does not influence the grain size variation in the lateral growth region over 1-2 micrometers area, however, the undulation of intensity about 10mJ/cm2 over 10 micrometers distance produces an appreciable changes in the grain sizes. Such a local temperature distribution corresponds to the envelop obtained by averaging small area, and is maintained during crystallization process.
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Kenkichi Suzuki, Kenkichi Suzuki, Masakazu Saitou, Masakazu Saitou, Michiko Takahashi, Michiko Takahashi, Nobuaki Hayashi, Nobuaki Hayashi, Takao Terabayashi, Takao Terabayashi, } "Correlation between power density fluctuation and grain size distribution of laser-annealed polycrystalline silicon", Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); doi: 10.1117/12.352693; https://doi.org/10.1117/12.352693
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