15 July 1999 Excimer laser micromachining: a 15-year perspective
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Abstract
Reports in 1982 of polymers ablated and etched by excimer laser radiation mark the founding of laser micromachining as a technology that in the intervening period has matured into a manufacturing process used by a diverse range of industries. This paper describes some of these industrial applications.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Malcolm C. Gower, "Excimer laser micromachining: a 15-year perspective", Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); doi: 10.1117/12.352688; https://doi.org/10.1117/12.352688
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