Laser surface cleaning of electronic materials

Yongfeng Lu; Wen Dong Song; Y. Zhang; Yuan Wei Zheng

doi:10.1117/12.352690

15 July 1999 Laser surface cleaning of electronic materials

Yongfeng Lu, Wen Dong Song, Y. Zhang, Yuan Wei Zheng

Proceedings Volume 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV; (1999) https://doi.org/10.1117/12.352690
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

Laser cleaning was demonstrated both theoretically and experimentally to be an effective cleaning techniques for removing particulate and thin film contaminants from electronic materials. Two types of laser cleaning techniques have been discussed, relying on pulsed laser of the surface without or with the presence of a thin liquid coating. For dry and steam laser cleaning, cleaning models were established for removal of particles from substrate surfaces without or with a thin liquid layer by taking adhesion forces and cleaning force into account. The models not only explain the influence of laser fluence on cleaning efficiency, but also predict the cleaning thresholds. The laser-induced removal of organic thin film contaminants is considered due to laser ablation of the contaminants. Applications of laser cleaning to clean magnetic sliders, magnetic media surfaces, IC mold and PCB will also be addressed.

Citation Download Citation

Yongfeng Lu, Wen Dong Song, Y. Zhang, and Yuan Wei Zheng "Laser surface cleaning of electronic materials", Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); https://doi.org/10.1117/12.352690

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