Laser welding of functional and constructional ceramics for microelectronics

Horst Exner; Anne-Maria Nagel

doi:10.1117/12.352689

15 July 1999 Laser welding of functional and constructional ceramics for microelectronics

Horst Exner, Anne-Maria Nagel

Proceedings Volume 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV; (1999) https://doi.org/10.1117/12.352689
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

We are presenting a very successful new method of a laser welding technology developed in the Laser Institute of Mittel-sachsen. It allows us to join parts of alumina without any changes of their properties base don an additive free procedure. Furthermore it enables us to carry out the procedure without furnaces and in natural atmosphere within only a few minutes. In order to avoid thermally included stresses two laser beams are used. We will describe this procedure of laser welding of ceramics including the manner of preheating: their limits and advantages. The thermal influence on the welding bath and the grain structure will be discussed. High pure laser welded Al₂O₃-ceramic parts of various shapes will be presented. This new method of laser welding of ceramics opens up a wide field of new application. Almost now a lot of branches of industry have already shown their interest in this promising technique. Most applications are expected with sensor elements generally, and in the protection of electronic elements against high temperatures, abrasion and/or chemical attacks.

Citation Download Citation

Horst Exner and Anne-Maria Nagel "Laser welding of functional and constructional ceramics for microelectronics", Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); https://doi.org/10.1117/12.352689

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