Translator Disclaimer
15 July 1999 Pulsed laser deposition of Ti:sapphire thin films using high-speed rotating target
Author Affiliations +
Abstract
We describe the deposition of Ti:sapphire thin films by the pulsed-laser deposition (PLD) method for the waveguide laser application, with an emphasis on the reduction of droplets which is inevitably generate during PLD. In order to eliminate the droplets for the film surface, we introduced centrifugal separation of the droplets out of the laser ablation plume using a high-speed rotating target. The behavior of droplets in the ablation plume generated with a high-speed rotating target is presented along with the film properties.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yoshiki Nakata, Hiroshi Uetsuhara, Satoshi Goto, Nilesh J. Vasa, Tatsuo Okada, and Mitsuo Maeda "Pulsed laser deposition of Ti:sapphire thin films using high-speed rotating target", Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); doi: 10.1117/12.352721; https://doi.org/10.1117/12.352721
PROCEEDINGS
8 PAGES


SHARE
Advertisement
Advertisement
Back to Top