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15 July 1999 Reliability and lifetime of UV excilamps pumped by glow, barrier, and capacitive discharges
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Abstract
In the recent years, great progress in development of spontaneous UV and VUV sources, radiating on the transitions of excimer and exciplex molecules has been achieved. However, practical use of sealed-off excilamps is limited by low lifetime of gas mixture. In this paper, stability of output parameters of the excilamps pumped by glow, barrier and capacitive discharges is studied and the mechanism of chlorine losses in low pressure halogen containing excilamps made of quartz is determined.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Victor F. Tarasenko, Evgenii B. Chernov, Mikhail V. Erofeev, Alexei N. Panchenko, Victor S. Skakun, and Edward A. Sosnin "Reliability and lifetime of UV excilamps pumped by glow, barrier, and capacitive discharges", Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); https://doi.org/10.1117/12.352719
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