Composition and thickness distribution of carbon overcoat films on thin film magnetic disks studied with surface reflectance analyzers

Gerard H. Vurens; David Klein

doi:10.1117/12.343710

29 March 1999 Composition and thickness distribution of carbon overcoat films on thin film magnetic disks studied with surface reflectance analyzers

Gerard H. Vurens, David Klein

Author Affiliations +

Proceedings Volume 3619, Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays; (1999) https://doi.org/10.1117/12.343710
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

Surface Reflectance Analysis (SRA) is an emerging optical inspection technique for studying and quantifying the composition and thickness uniformity of thin films on surfaces. This article will concentrate on measuring the uniformity of amorphous carbon overcoats on thin film magnetic disks. SRA is in essence a high speed ellipsometer with scattered light detection capability. We will show how this technique can be used for mapping the uniformity of deposited film thickness, while simultaneously giving information about the uniformity of the film composition. Composition and thickness variations can be related to the geometry of the sputtering system used to deposit the carbon films. Obviously, variations in sputter conditions also give rise to thickness and composition variations. We will also discuss the application of SRA in the analysis of localized film thickness variations such as defects in the deposition process or local wear of the films. Other applications of SRA include analysis of substrates and oxide films on silicon wafers. The principle of operation, the data interpretation and data analysis procedures of the SRA technique will be discussed in detail.

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Gerard H. Vurens and David Klein "Composition and thickness distribution of carbon overcoat films on thin film magnetic disks studied with surface reflectance analyzers", Proc. SPIE 3619, Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays, (29 March 1999); https://doi.org/10.1117/12.343710

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