29 March 1999 Measurement of scatter from PSL standard spheres deposited on disk surfaces
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Abstract
Accurately sized PSL spheres of several diameters are deposited on disks. Scatter from the depositions is measured and compared to the results of a model for surface bound particles. The results are important for two reasons. The measurements will help provide an early database for determining the smallest detectable particles for a given disk texture. Secondly, the use of these particular PSL spheres, which have been accurately sized to about 1% of their diameter, will be important for establishing particle standards for the disk industry.
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Craig A. Scheer, Craig A. Scheer, John C. Stover, John C. Stover, } "Measurement of scatter from PSL standard spheres deposited on disk surfaces", Proc. SPIE 3619, Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays, (29 March 1999); doi: 10.1117/12.343714; https://doi.org/10.1117/12.343714
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