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26 March 1999 Fabrication of hybrid sol-gel glass diffractive elements
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Abstract
Organically modified photosensitive hybrid glasses are synthesized and used for the fabrication of diffractive optical elements. The material synthesis is based on a sol-gel process. The materials are spin-deposited onto glass substrate that also have a significant role in the component assembly. The synthesized material has a negative tone property under UV-radiation and they can be patterned by a conventional UV- lithography process. Binary diffractive lenses are photoimprinted through an amplitude contact mask. Optical properties and surface roughness of the materials and elements are evaluated. Diffraction efficiencies of the elements are also measured. The process and material optimization for the reliable fabrication of integrated optics devices is carried out.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Juha T. Rantala, Pekka Ayras, Raviv Levy, Michael R. Descour, Seppo Honkanen, and Nasser Peyghambarian "Fabrication of hybrid sol-gel glass diffractive elements", Proc. SPIE 3620, Integrated Optics Devices III, (26 March 1999); https://doi.org/10.1117/12.343732
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