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26 March 1999 Perturbational estimation of geometry tolerances for rectangular integrated optics devices
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Shifting the location of a dielectric boundary in the cross section of an integrated optical waveguide with piecewise constant refractive index profile results in a permittivity perturbation in a layer along the discontinuity line. On the basis of these thin layer perturbations, we discuss perturbational expressions for the derivatives of the propagation constants with respect to geometry parameters, both for fully vectorial, hybrid and for semivectorial approximations to the basic mode fields. The expressions are numerically verified by comparison with rigorously calculated data for a common semiconductor rib waveguide. Applied to a more complex device, the perturbational approach allows to estimate its complete set of tolerances for the geometry parameters including the wavelength, on the basis of a single mode analysis. This is exemplified with a two rib waveguide coupler. By comparison with conventionally computed tolerances we give some assessment for the applicability of the effective perturbational approach.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Manfred Lohmeyer, Norbert Bahlmann, Oleksandr Zhuromskyy, and Peter Hertel "Perturbational estimation of geometry tolerances for rectangular integrated optics devices", Proc. SPIE 3620, Integrated Optics Devices III, (26 March 1999);

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