Thin films of LiNb0.5Ta0.5O3 prepared on SiO2/Si substrates by sol-gel processing

Shi De Cheng; Chan Hin Kam; Yan Zhou; Yee Loy Lam; Yuen Chuen Chan; Woon Siong Gan

doi:10.1117/12.343731

26 March 1999 Thin films of LiNb_0.5Ta_0.5O₃ prepared on SiO₂/Si substrates by sol-gel processing

Shi De Cheng, Chan Hin Kam, Yan Zhou, Yee Loy Lam, Yuen Chuen Chan, Woon Siong Gan

Author Affiliations +

Proceedings Volume 3620, Integrated Optics Devices III; (1999) https://doi.org/10.1117/12.343731
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

In this paper, we report the preparation and characterization of sol-gel derived thin films of LiNb_0.5Ta_0.5O₃ on the silica-on silicon substrate. The solution is prepared by mixing LiOC₂H₅, Nb(OC₂H₅)₅ and Ta(OC₂H₅)₅ and the thin films are prepared using spin coating. The films are annealed at different temperatures of 400, 500, 600, and 700 degrees Celsius. Our X-ray diffraction study show that the films are amorphous when annealed at 400 degrees Celsius and are crystallized over 500 degrees Celsius. The crystallized films are slightly a-axis oriented. Nanocrystalline grains with the size of about several tens of nanometers are observed in the crystallized films under an atomic force microscope, making the films potential candidates for electro-optical/acousto-optical applications.

Citation Download Citation

Shi De Cheng, Chan Hin Kam, Yan Zhou, Yee Loy Lam, Yuen Chuen Chan, and Woon Siong Gan "Thin films of LiNb_0.5Ta_0.5O₃ prepared on SiO₂/Si substrates by sol-gel processing", Proc. SPIE 3620, Integrated Optics Devices III, (26 March 1999); https://doi.org/10.1117/12.343731

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