Process simulation of selective-area MOCVD growth for optoelectronic integrated circuits

Muhammad A. Alam; Roosevelt People; Mark S. Hybertsen

doi:10.1117/12.356901

6 August 1999 Process simulation of selective-area MOCVD growth for optoelectronic integrated circuits

Muhammad A. Alam, Roosevelt People, Mark S. Hybertsen

Proceedings Volume 3625, Physics and Simulation of Optoelectronic Devices VII; (1999) https://doi.org/10.1117/12.356901
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

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Muhammad A. Alam, Roosevelt People, and Mark S. Hybertsen "Process simulation of selective-area MOCVD growth for optoelectronic integrated circuits", Proc. SPIE 3625, Physics and Simulation of Optoelectronic Devices VII, (6 August 1999); https://doi.org/10.1117/12.356901

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