6 August 1999 Reactor and process modeling in optoelectronic device fabrication
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Meyya Meyyappan, Meyya Meyyappan, Deepak Bose, Deepak Bose, } "Reactor and process modeling in optoelectronic device fabrication", Proc. SPIE 3625, Physics and Simulation of Optoelectronic Devices VII, (6 August 1999); doi: 10.1117/12.356905; https://doi.org/10.1117/12.356905
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